NDLI: Design and Modeling of a Nanomechanical Sensor Using Silicon Photonic Crystals

Content Provider	IEEE Xplore Digital Library
Author	Chengkuo Lee Radhakrishnan, R. Chii-Chang Chen Jing Li Thillaigovindan, J. Balasubramanian, N.
Copyright Year	1983
Abstract	Conventionally a line defect in the photonic crystal (PhC) is used to create a waveguide for light propagation through the PhC. A PhC based filter is designed by introducing micro-cavities within the line defect so as to form the resonant bandgap structure for PhC. Such a PhC waveguide (PhCWG) filter shows sharp resonant peak in output wavelength spectrum. We proposed a suspended silicon bridge structure comprising this PhCWG filter structure. Since the output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. Shift of the output resonant wavelength is observed for suspended PhCWG beam structure under particular force loading. In other words, the induced strain modifies the shape of air holes and the spacing among them. Such an effect leads to shift of resonant wavelength. Under optical detection limitation of 0.1 nm for resonant wavelength shift, the sensing capability of this nanomechanical sensor is derived as that vertical deformation is 20-25 nm at the center and the smallest strain is 0.005% for defect length. This innovative design conceptualizes a new application area for PhCs, i.e., the nanometer-scale physical sensors for strains and forces.
Sponsorship	IEEE Lasers and Electro-Optics Society Optical Society of America
Starting Page	839
Ending Page	846
Page Count	8
File Size	913776
File Format	PDF
ISSN	07338724
Volume Number	26
Issue Number	7
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-04-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optoelectronic and photonic sensors Silicon Photonic crystals Resonance Filters Capacitive sensors Optical waveguides Shape Optical sensors Optical propagation photonic crystals (PhCs) Microelectromechanical systems (MEMS) nanoelectromechanical systems (NEMS) nano mechanical sensor nano photonics
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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