NDLI: Asymmetric Tuning Schemes of MEMS Dual-Shutter VOA

Content Provider	IEEE Xplore Digital Library
Author	Zhang, X.M. Zhao, Q.W. Liu, A.Q. Zhang Lau, J.H. Kam, C.H.
Copyright Year	1983
Abstract	A dual-shutter MEMS variable optical attenuator (VOA) is designed for advanced tuning functions such as linear attenuation relationship and simultaneous coarse and fine tunings. The mechanism behind is to take advantage of the additional shutter to render one more degree of freedom for attenuation adjustment. Although dual-shutter VOAs with asymmetric functionalities have been reported before, these intrinsic capabilities owing to asymmetry have not been extensively investigated. In experiment, the fabricated VOA device has demonstrated a linear tuning over a 20-dB range with respect to the driving voltage of one shutter, and it has also realized simultaneously coarse tuning (2.5 dB/V) and fine tuning (0.1 dB/V) by the two shutters. Ideally, the tuning can start from any available working point, linear to any controlling parameter, at any slope of linearity, and with any tuning resolution. Theoretical attenuation model has also been developed to provide a roadmap for the VOA design and choice of working point. An interesting finding is that over a certain range the linear attenuation can be obtained by moving a fixed aperture rather than by reducing the aperture size, which greatly relaxes the difficulty of shutter position control. The measured results match well with the theoretical data, implying the possibility of developing a look-up table to locate the shutter positions quickly. The dual-shutter VOA accomplishes these features without the need of high-precision control systems and therefore gives a structure-based rather than a control-system-based solution, clearly advantageous over the previously developed VOAs.
Sponsorship	IEEE Lasers and Electro-Optics Society Optical Society of America
Starting Page	569
Ending Page	579
Page Count	11
File Size	2793620
File Format	PDF
ISSN	07338724
Volume Number	26
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-03-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Optical tuning Optical attenuators Attenuation Apertures Control systems Optical design Voltage Linearity Position control variable optical attenuator Linear attenuation microelectromechanical systems (MEMS) microoptics ultrafine tuning
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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