NDLI: A Dynamic 3-D Surface Profilometer With Nanoscale Measurement Resolution and MHz Bandwidth for MEMS Characterization

Content Provider	IEEE Xplore Digital Library
Author	Liang-Chia Chen Yao-Ting Huang Kuang-Chao Fan
Copyright Year	1996
Abstract	Commercialization of microelectromechanical systems (MEMS) has made accurate dynamic characterization a major challenge in design and fabrication. In view of this need, a dynamic 3-D surface profilometer involving white light interferometric scanning principle with a stroboscopic LED light source was developed. The developed instrument was applied to a microcantilever beam used in atomic force microscopy (AFM) to analyze its full-field resonant vibratory behavior. The first five resonant vibration modes were fully characterized with vertical measurement accuracy of 3-5 nm and vertical measurement in the range of tens of micrometers. The experimental results were consistent with the outcomes of the theoretical simulation by ANSYS. Using stroboscopic illumination and white light vertical scanning techniques, the developed static and dynamic 3D nanoscale surface profilometry of MEMS devices can achieve measurement range of tens of micrometers and dynamic bandwidth of up to 1-MHz resonance frequency.
Starting Page	299
Ending Page	307
Page Count	9
File Size	847981
File Format	PDF
ISSN	10834435
Volume Number	12
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bandwidth Micromechanical devices Resonance Vibration measurement Atomic force microscopy Commercialization Microelectromechanical systems Fabrication Optical interferometry Light emitting diodes stroboscopic interferometry Dynamic profilometry integrated mechatronics microelectromechanical systems (MEMS) dynamic characterization
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering Computer Science Applications

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