NDLI: Single-mode rib optical waveguides on SOG/SU-8 polymer and integrated Mach-Zehnder for designing thermal sensors

Content Provider	IEEE Xplore Digital Library
Author	Pelletier, N. Beche, B. Gaviot, E. Camberlein, L. Grossard, N. Polet, F. Zyss, J.
Copyright Year	2001
Abstract	This paper presents a successful design, realization,and characterization of single-mode rib optical waveguides on SOG/SU-8 polymers in order to highlight a new approach to designing heat sensors. The basic principle of this new thermal-sensing method relies on the differential thermal behavior regarding both acting arms of a micro Mach-Zehnder Interferometer(MZI). First, two families of single-mode straight rib waveguides composed of SOG/SU-8 polymers are analyzed. Hence, optical losses for TE₀₀ and TM₀₀ optical modes for structures on Si/SiO₂/SU-8 have been estimated respectively as 1,36 plusmn 0,02 and 2,01plusmn0,02 dBmiddotcm^-1, while the second one composed of Si/SiO₂/SOG/SU-8 presented losses of 2,33 plusmn 0,02 and 2,95plusmn0,02 dBmiddotcm^-1. Then, owing to modeling results, an experimental sensor is realized as an integrated device made up of SU-8 polymer mounted on a standard silicon wafer. When subjected to a radiant source, as a laser light (980 nm) is injected across the cleaved input face of the MZI, the significant change of output signal allows us to consider a new approach to measuring radiant heat flowrate. Experimental results are given regarding the obtained phase shift against the subjected thermal power. According to the modeling results, one can expect new highly sensitive devices to be developed in the next coming years, with advantageous prospective industrial applications
Sponsorship	IEEE Sensors Council
Starting Page	565
Ending Page	570
Page Count	6
File Size	2232097
File Format	PDF
ISSN	1530437X
Volume Number	6
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical polymers Optical sensors Optical waveguides Integrated optics Optical design Thermal sensors Optical interferometry Sensor phenomena and characterization Arm Optical losses SU-8 Heat flow rate sensor integrated optics Mach–Zehnder interferometer (MZI) optical losses measurement optical rib waveguides polymer spin-on-glass (SOG)
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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