NDLI: Fast 10-/spl mu/s microelectromechanical optical switch inside a planar hollow waveguide (PHW)

Content Provider	IEEE Xplore Digital Library
Author	Guerre, R. Fahrni, F. Renaud, P.
Copyright Year	1983
Abstract	A new concept for a 1 times 2 micromechanical optical switch with 10 mus of switching speed, 29 dB of ON/OFF ratio, and insertion loss of -7.22 dB for lambda=1550 nm and -4.96 dB for lambda=635 nm is presented. The idea is to insert a micromechanical switching mechanism composed of a vertical silicon cantilever beam inside a hollow planar optical waveguide structured in a silicon-on-insulator (SOI) wafer. The switching beam in the Y hollow waveguide is electrostatically actuated, which makes it deflect to one side or the other in order to redirect light in one of the two outputs. Switching times of less than 10 mus were measured with the produced devices. Compared to classical microelectromechanical systems (MEMS) switches, the concept presents the advantage to decrease the risks of misalignment between the mirror and the optical waveguide, as the two elements are defined in the same process step, and as the mirror position is less critical than for classical MEMS switches. It also limits the optical losses due to beam spreading that occurs in free-space configuration. Three different optical surfaces for the hollow waveguides were studied-a gold coating, an antiresonant reflecting optical waveguide (ARROW) optical coating, and bare hollow silicon
Sponsorship	IEEE Lasers and Electro-Optics Society Optical Society of America
Starting Page	1486
Ending Page	1498
Page Count	13
File Size	712320
File Format	PDF
ISSN	07338724
Volume Number	24
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-03-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical switches Optical waveguides Hollow waveguides Optical planar waveguides Planar waveguides Micromechanical devices Optical losses Silicon Mirrors Coatings optical switches Antiresonant reflecting optical waveguide (ARROW) hollow waveguides microelectromechanical systems (MEMS) optical coatings optical MEMS
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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