NDLI: Moore's law in homeland defense: an integrated sensor platform based on silicon microcantilevers

Content Provider	IEEE Xplore Digital Library
Author	Pinnaduwage, L.A. Hai-Feng Ji Thundat, T.
Copyright Year	2001
Abstract	An urgent need exists for the development of inexpensive, highly selective, and extremely sensitive sensors to help combat terrorism. If such sensors can be made miniature, they could be deployed in virtually any situation. Terrorists have a wide variety of potential agents and delivery means to choose from for chemical, biological, radiological, or explosive attacks. Detecting terrorist weapons has become a complex and expensive endeavor, because a multitude of sensor platforms is currently needed to detect the various types of threats. The ability to mass produce and cost effectively deploy a single type of sensor that can detect a wide range of threats is essential in winning the war on terrorism. Silicon-based microelectromechanical sensors (MEMS) represent an ideal sensor platform for combating terrorism because these miniature sensors are inexpensive and can be deployed almost anywhere. Recently, the high sensitivity of MEMS-based microcantilever sensors has been demonstrated in the detection of a variety of threats. Therefore, the critical requirements for a single, miniature sensor platform have been met and the realization of an integrated, widely deployable MEMS sensor could be near.
Sponsorship	IEEE Sensors Council
Starting Page	774
Ending Page	785
Page Count	12
File Size	1664324
File Format	PDF
ISSN	1530437X
Volume Number	5
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Moore's Law Silicon Terrorism Biosensors Micromechanical devices Chemical sensors Chemical technology Chemical and biological sensors Explosives Sensor systems terrorism Chemical, biological, radiological, or explosive (CBRE) detection homeland defense microcantilever microelectromechanical sensors (MEMS) sensor
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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