NDLI: Single mask, large force, and large displacement electrostatic linear inchworm motors

Content Provider	IEEE Xplore Digital Library
Author	Yeh, R. Hollar, S. Pister, K.S.J.
Copyright Year	1992
Abstract	We have demonstrated a family of large force and large displacement electrostatic linear inchworm motors that operate with moderate to high voltages. The inchworm motor design decouples actuator force from total travel and allows the use of electrostatic gap-closing actuators to achieve large force and large displacement while consuming low power. A typical inchworm motor measures 3 mm /spl times/ 1 mm /spl times/ 50 /spl mu/m and can lift over 130 times its own weight. One motor has achieved a travel of 80 /spl mu/m and a calculated force of 260 /spl mu/N at 33 V. The force density of that motor was 87 /spl mu/N/mm/sup 2/ at 33 V and the energy efficiency was estimated at 8%. Another motor displaced the shuttle at an average velocity of almost 4 mm/s and achieved an estimated power density of 190 W/m/sup 3/. Motors were cycled 23.6 million times for over 13.5 h without stiction. This family of motors is fabricated in silicon-on-insulator (SOI) wafers using a single mask.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	330
Ending Page	336
Page Count	7
File Size	290692
File Format	PDF
ISSN	10577157
Volume Number	11
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatic actuators Energy efficiency Micromechanical devices Thermal force Voltage Piezoelectric actuators Micromotors Silicon on insulator technology Electrostatic measurements Medical services
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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