NDLI: Methodology for characterization of high-speed multi-conductor metal interconnections and evaluation of measurement errors

Content Provider	IEEE Xplore Digital Library
Author	Palusinski, O.A. Znamirowski, L. Reiss, K. Grabinski, H.
Copyright Year	1999
Abstract	Analysis and design of interconnects in high speed integrated circuits and systems involves models in the form of multiconductor transmission lines. The fundamental parameters of those models are matrices of capacitance, (C), inductance, (L), resistance, (R), and conductance (G). We present a methodology for measurement of entries in capacitance matrix. The entries of capacitance matrices can be calculated using numerical solvers of electrostatic fields established under the assumption of suitable biasing of interconnect structures. Numerical calculations of complete field equations are very complex and expensive in terms of computer time, therefore several approximations are made in constructing interconnect dedicated software packages available on the market. Because of these approximations it is necessary to validate the calculations via measurements. Calculation of the off-diagonal entries of capacitance matrix from measurements of "two-terminal" capacitances is strongly corrupted by the measuring errors. The method involves direct capacitance measurement in multi-conductor structures and provides analysis of accuracy.
Sponsorship	IEEE Components, Packaging, and Manufacturing Technology Society IEEE Components, Packaging and Manufacturing Technology Society
Starting Page	347
Ending Page	355
Page Count	9
File Size	635881
File Format	PDF
ISSN	15213323
Volume Number	25
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-08-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Measurement errors Integrated circuit interconnections Transmission line matrix methods Capacitance measurement Error analysis High speed integrated circuits Integrated circuit modeling Multiconductor transmission lines Inductance Electrical resistance measurement
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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