NDLI: Optical and electrical properties of nanostructured metal-silicon-metal photodetectors

Content Provider	IEEE Xplore Digital Library
Author	Sharma, A.K. Zaidi, S.H. Logofatu, P.C. Brueck, S.R.J.
Copyright Year	1965
Abstract	We report an experimental evaluation of the performance of silicon (Si) photodetectors incorporating one-dimensional (1-D) arrays of rectangular and triangular-shaped nanoscale structures within their active regions. A significant (/spl sim/2/spl times/) enhancement in photoresponse is achieved in these devices across the 400- to 900-nm spectral region due to the modification of optical absorption properties that results from structuring the Si surface on physical optics scales smaller than the wavelength, which both reduces the reflectivity and concentrates the optical field closer to the surface. Both patterned (triangular and rectangular lineshape) and planar Ni-Si back-to-back Schottky barrier metal-semiconductor-metal photodetectors on n-type (/spl sim/5/spl times/10/sup 14/ cm/sup -3/) bulk Si were studied. 1-D /spl sim/50-250-nm linewidth, /spl sim/1000-nm depth, grating structures were fabricated by a combination of interferometric lithography and dry etching. The nanoscale grating structures significantly modify the absorption, reflectance, and transmission characteristics of the semiconductor: air interface. These changes result in improved electrical response leading to increased external quantum efficiency (from /spl sim/44% for planar to /spl sim/81% for structured devices at /spl lambda/=700 nm). In addition, a faster time constant (/spl sim/1700 ps for planar to /spl sim/600 ps for structured at /spl lambda/=900 nm) is achieved by increasing the absorption near the surface where the carriers can be rapidly collected. Experimental quantum efficiency and photocurrents results are compared with a theoretical photocurrent model based on rigorous coupled-wave analysis of nanostructured gratings.
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1651
Ending Page	1660
Page Count	10
File Size	1216726
File Format	PDF
ISSN	00189197
Volume Number	38
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Photodetectors Physical optics Optical interferometry Absorption Optical surface waves Gratings Nanostructures Optical devices Surface waves Reflectivity
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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