NDLI: Phase-sensitive vision technique for high accuracy position measurement of moving targets

Content Provider	IEEE Xplore Digital Library
Author	Sandoz, P. Ravassard, J.C. Dembele, S. Janex, A.
Copyright Year	1963
Abstract	This paper presents a vision technique for position and displacement measurement of moving targets. An adapted phase reference pattern is fixed to the object to be controlled and allows the location of the object in the scene observed by a static camera with an accuracy better than 10/sup -2/ pixel. The phase reference pattern is scaled as a function of the desired field of observation and position accuracy. Then the system measurement performances can be chosen from the nanometer to the millimeter ranges (or even larger). Furthermore, the method is self calibrating in length, since the phase reference pattern includes its own length reference. Drifts in vision system magnification therefore do not affect the measurement accuracy. Applications can be used in different fields, for instance, the position control of masks and wafers in photolithography processes or the servo-control of micro-robots.
Sponsorship	IEEE Instrumentation and Measurement Society Bureau international des poids et mesures IEEE International Bureau of Weights and Measures (BIPM) URSI NBS Agency Ind. Sci. & Technol., Min. Int. Trade & Ind. Sci. Council Japan International Union of Pure and Applied Physics (IUPAP) NIST NRCC National Conference of Standards Laboratories (NCSL) Allen Osborne Associates Andeen-Hagerling, Inc. Ballantine Lab. Inc. Clarke-Hess Communications Research Corp. Fluke Corporation Guildline Instruments Hewlett-Packard Co. Julie Res. Lab. Inc. Keithley Instruments, Inc. Measurements International Ltd. Canada QuadTech Inc. Quantum Design Inc. Rotek Instrum. Corp. Tegam Inc. Tektronix Inc
Starting Page	867
Ending Page	872
Page Count	6
File Size	148377
File Format	PDF
ISSN	00189456
Volume Number	49
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Position measurement Strips Displacement measurement Machine vision Wavelet transforms Layout Cameras Wavelet analysis Optical distortion Optical interferometry
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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