NDLI: Measurement of the thermal conductivity anisotropy in polyimide films

Content Provider	IEEE Xplore Digital Library
Author	Kurabayashi, K. Asheghi, M. Touzelbaev, M. Goodson, K.E.
Copyright Year	1992
Abstract	Polymer films are playing an important role in the development of micromachined sensors and actuators, fast logic circuits, and organic optoelectronic devices. The thermal properties of polyimide films govern the temporal response of many micromachined thermomechanical actuators, such as ciliary arrays. This work develops three experimental techniques for measuring both the in-plane and the out-of-plane thermal conductivities of spin-coated polyimide films with thicknesses between 0.5 and 2.5 /spl mu/m, which are common in MEMS. Two of the techniques use transient electrical heating and thermometry in micromachined structures to isolate the in-plane and out-of-plane components. These techniques establish confidence in a third, simpler technique, which measures both components independently and uses IC-compatible processing. The data illustrate the anisotropy in the thermal conductivity of the polyimide films investigated here, with the in-plane conductivity larger by a factor between four and eight depending on film thickness and temperature. The anisotropy diminishes the time constants of thermal actuators made from polyimide films.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	180
Ending Page	191
Page Count	12
File Size	457533
File Format	PDF
ISSN	10577157
Volume Number	8
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Thermal conductivity Conductivity measurement Anisotropic magnetoresistance Polyimides Actuators Anisotropic conductive films Polymer films Optoelectronic and photonic sensors Logic circuits Optoelectronic devices
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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