NDLI: A novel integrated silicon capacitive microphone-floating electrode electret microphone (FEEM)

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A novel integrated silicon capacitive microphone-floating electrode electret microphone (FEEM)

Content Provider	IEEE Xplore Digital Library
Author	Quanbo Zou Zhimin Tan Zhenfeng Wang Jiangtao Pang Xin Qian Qingxin Zhang Rongming Lin Sung Yi Haiqing Gong Litian Liu Zhijian Li
Copyright Year	1992
Abstract	A novel principle "electret" microphone, i.e., floating electrode electret microphone, is proposed and implemented in this study. Single-chip fabrication and corrugation technique are used in the design and fabrication of the microphone. The floating electrode is encapsulated by highly insulated materials to ensure that there is no electric-leakage passage between the floating electrode and the electrodes of the microphone. Net-free electronic charges (not "bonded" charges as in traditional electret) in the floating electrode can excite the electric field, which is similar to that of the traditional electret. The floating electrode can be easily charged by use of the "hot" electron technique, available using the avalanche breakdown of the p/sup +/-n junction. Therefore, the electret microphone is rechargeable, which can greatly increase the lifetime of the device. The preamplifier has been on-chip integrated in a junction-field-effect transistor (JFET) source-follower type with resistors by use of ion implantation. Electret charges are banded in a deep potential trap, thus, this microphone can operate at a high temperature (as high as 300/spl deg/C) and has high stability and reliability. Experiments show that the prototype has a 3-mV/Pa sensitivity and a larger than 21-kHz frequency bandwidth in a 1 mm /spl times/1-mm diaphragm area. Microphone performance can be further improved by optimized process and design. The fabrication is completely integrated-circuit (IC) compatible, hence, the microphone shows promise in integrated acoustic systems.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	224
Ending Page	234
Page Count	11
File Size	353673
File Format	PDF
ISSN	10577157
Volume Number	7
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Electrodes Microphones Electrets Fabrication Dielectrics and electrical insulation Electrons Avalanche breakdown Preamplifiers Resistors
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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