NDLI: Fabrication of an S-shaped microactuator

Content Provider	IEEE Xplore Digital Library
Author	Shikida, M. Sato, K. Harada, T.
Copyright Year	1992
Abstract	We have developed a new fabrication process for electrostatic actuators having an S-shaped film element, which we previously invented for such applications as gas valves. The developed process allows batch fabrication of the actuator whose S-shaped structure height, which is equal to the amount of vertical film displacement, is of the order of a few hundred micrometers. The microactuators are fabricated by stacking three wafers. The middle wafer contains the sputtered Ni film strip which is buckled into an S-shape during the stacking process. The length of film necessary for the S-bend profile has a folded structure which is stretched after stacking. The size of the fabricated chip was 5 mm/spl times/5 mm, and the vertical film displacement was 220 /spl mu/m. The actuator was operated by electrostatic force when the applied voltage was more than 70 V.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	18
Ending Page	24
Page Count	7
File Size	364372
File Format	PDF
ISSN	10577157
Volume Number	6
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-03-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Microactuators Electrostatic actuators Valves Electrodes Microvalves Gases Stacking Voltage Conductive films
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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