NDLI: Hybrid optical-electrical overlay test structure

Content Provider	IEEE Xplore Digital Library
Author	Cresswell, M.W. Allen, R.A. Linholm, L.W. Guthrie, W.F. Penzes, W.B. Gurnell, A.W.
Copyright Year	1988
Abstract	This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor semiconductor-device fabrication processes. Such optical instruments are known to be vulnerable to hard-to-determine systematic process- and instrument-specific errors known as shifts. However, these shift errors generally do not affect electrical test-structure measurements extracted from the same features. Thus the opportunity exists to configure physical standards having overlay targets that can be certified by electrical means, thereby enabling estimates of the shifts prevailing in a particular application. In this work, a new hybrid test structure, meaning one from which overlay measurements can be extracted electrically, as well as by optical instruments, has been designed and fabricated with built-in overlay values ranging from -60 to +60 nm. A selection of structures constituting a test chip has been patterned in a single conducting film with CD (critical dimension) design rules ranging from 1.0 /spl mu/m to 2.0 /spl mu/m and fabricated and tested. Electrical overlay parameters, derived from multiple step-and-repeat die-site measurements, generally match the corresponding optical measurements to within several nanometers, subject to limitations of the pattern-replication process. This paper focuses on the extraction of overlay from the electrical measurements, the dependence of the measurements on CD design rules, and their comparison with the corresponding measurements made both by a commercial optical-overlay instrument and by a coordinate-measurement system having measurements traceable to absolute dimensional standards. It is presented as a first step toward the use of electrical measurements for advancing shift management in optical overlay of features patterned in separate lithographic processes.
Sponsorship	IEEE Electron Devices Society IEEE Components, Packaging, and Manufacturing Technology Society IEEE Reliability Society IEEE Solid-State Circuits Society
Starting Page	250
Ending Page	255
Page Count	6
File Size	154000
File Format	PDF
ISSN	08946507
Volume Number	10
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-05-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electric variables measurement Optical films Instruments Coordinate measuring machines Semiconductor device measurement Optical design Semiconductor device testing Calibration Monitoring Optical device fabrication
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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