NDLI: 15-term self-calibration methods for the error-correction of on-wafer measurements

Content Provider	IEEE Xplore Digital Library
Author	Heuermann, H. Schiek, B.
Copyright Year	1963
Abstract	An improved method of network analyzer calibration is described using the 15-term full model which includes all leakage errors between on-wafer probe tips. This model is well suited to eliminate measurement errors of network analyzer measurements on the wafer. All procedures presented are so-called self-calibration methods, allowing for standards that are not completely known. This allows one to create calibration standards in an easy way and to monitor the calibration process. Simple and robust closed-form equations are presented for all procedures. All procedures can be derived from the general method MURN (match, unknown, reflect, network). The MORN (match, open, reflect, network) is presented, which is particular interesting for on-wafer-measurements. Furthermore, the TMRN (through, match, reflect, network) procedure presented is especially designed for coaxial measurement problems. Experimental results of the TMRN method attest to the very good accuracy and viability of the 15-term self-calibration procedures and can be compared with other 15-term procedures.
Sponsorship	IEEE Instrumentation and Measurement Society Bureau international des poids et mesures IEEE International Bureau of Weights and Measures (BIPM) URSI NBS Agency Ind. Sci. & Technol., Min. Int. Trade & Ind. Sci. Council Japan International Union of Pure and Applied Physics (IUPAP) NIST NRCC National Conference of Standards Laboratories (NCSL) Allen Osborne Associates Andeen-Hagerling, Inc. Ballantine Lab. Inc. Clarke-Hess Communications Research Corp. Fluke Corporation Guildline Instruments Hewlett-Packard Co. Julie Res. Lab. Inc. Keithley Instruments, Inc. Measurements International Ltd. Canada QuadTech Inc. Quantum Design Inc. Rotek Instrum. Corp. Tegam Inc. Tektronix Inc
Starting Page	1105
Ending Page	1110
Page Count	6
File Size	608702
File Format	PDF
ISSN	00189456
Volume Number	46
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Calibration Scattering parameters Semiconductor device modeling Error correction Probes Error analysis Coaxial components Testing Measurement standards Measurement errors
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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