NDLI: Electrical breakdown of amorphous hydrogenated silicon rich silicon nitride thin film diodes

Content Provider	IEEE Xplore Digital Library
Author	Bijlsma, S.J. van Kranenburg, H. Nieuwesteeg, K.J.B.M. Pitt, M.G. Verweij, J.F.
Copyright Year	1963
Abstract	Electrical breakdown, both intrinsic and extrinsic, of thin film diodes used as switches in active matrix addressed liquid crystal displays has been studied using electrical measurements, thermal measurements, thermal 3D simulations, electrical simulations and post breakdown observations. The diodes used in this study consist of a layer of 30 nm amorphous hydrogenated silicon rich silicon nitride, sandwiched between metal electrodes. It will be shown that breakdown under dc bias is a thermal process. Thermal breakdown is shown to occur above a temperature level of 234/spl deg/C and is triggered by the onset of hydrogen effusion. Under certain conditions, low ohmic links are formed as a result of breakdown. Breakdown due to very short pulses (50-500 ns) shows a remarkable asymmetry in breakdown current between polarities. A hypothesis on this asymmetry is presented. Measurements suggest that a relation exists between current flow induced state creation in the nitride and breakdown phenomena. Furthermore, a statistical measurement technique is presented that uses breakdown to monitor the switch reliability in active matrix LCD production.
Sponsorship	IEEE Electron Devices Society
Starting Page	1592
Ending Page	1601
Page Count	10
File Size	1772686
File Format	PDF
ISSN	00189383
Volume Number	43
Issue Number	9
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Electric breakdown Amorphous materials Switches Active matrix organic light emitting diodes Electric variables measurement Transistors Active matrix addressing Liquid crystal displays Electrodes
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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