NDLI: Fabrication and performance of selectively oxidized vertical-cavity lasers

Content Provider	IEEE Xplore Digital Library
Author	Choquette, K.D. Lear, K.L. Schneider Jr., R.P. Geib, K.M. Figiel, J.J. Hull, R.
Copyright Year	1989
Abstract	We report the high yield fabrication and reproducible performance of selectively oxidized vertical-cavity surface emitting lasers. We show that linear oxidation rates of AlGaAs without an induction period allows reproducible fabrication of buried oxide current apertures within monolithic distributed Bragg reflectors. The oxide layers do not induce obvious crystalline defects, and continuous wave operation in excess of 650 h has been obtained. The high yield fabrication enables relatively high laser performance over a wide wavelength span. We observe submilliamp threshold currents over a wavelength range of up to 75 nm, and power conversion efficiencies at 1 mW output power of greater than 20% over a 50-nm wavelength range.<>
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1237
Ending Page	1239
Page Count	3
File Size	373271
File Format	PDF
ISSN	10411135
Volume Number	7
Issue Number	11
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-11-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical device fabrication Vertical cavity surface emitting lasers Surface emitting lasers Oxidation Apertures Distributed Bragg reflectors Crystallization Threshold current Power conversion Power generation
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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