NDLI: Challenges to manufacturing submicron, ultra-large scale integrated circuits

Content Provider	IEEE Xplore Digital Library
Author	Fair, R.B.
Copyright Year	1963
Abstract	It is argued that the cost of manufacturing submicron, ultra-large-scale integration (ULSI) integrated circuits (ICs) (which is scaling upward at least in inverse proportion to the downward scaling of device feature sizes) is driven by a parameter budget crisis associated with the technological and complexity limits of IC design and fabrication. This budget crisis is defined for technologies associated with patterning, mechanical control, thermal treatments, particulates and contamination, defects, electrical parameters, and manufacturing, R&D priorities for silicon ULSI are identified and quantified, and the potential impact of some recent research results is discussed. It is pointed out that the R&D agenda to deal with the ULSI manufacturing budget crisis is enormous, and the semiconductor industry cannot perform all of it. Since the time for transferring new developments into production tools and technologies is five to seven years, it is concluded that critical funding decisions need to be made now for ULSI manufacturing science breakthroughs by the turn of the century.<>
Sponsorship	IEEE Publication
Starting Page	1687
Ending Page	1705
Page Count	19
File Size	2027378
File Format	PDF
ISSN	00189219
Volume Number	78
Issue Number	11
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1990-11-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Manufacturing Ultra large scale integration Semiconductor device manufacture Integrated circuit technology Costs Integrated circuit manufacture Fabrication Contamination Silicon Electronics industry
Content Type	Text
Resource Type	Article
Subject	Computer Science Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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