NDLI: PEPPER-a process simulator for VLSI

Content Provider	IEEE Xplore Digital Library
Author	Mulvaney, B.J. Richardson, W.B. Crandle, T.L.
Copyright Year	1982
Abstract	PEPPER is a computer program that simulates in one dimension the ion implantation, diffusion, oxidation, epitaxy, deposition, and etch processes used in VLSI technology. The program contains an efficient Monte Carlo ion implantation algorithm that includes explicit calculation of ion channeling and damage. The key feature of the diffusion calculation is a general partial differential equation solver for rapid prototyping of physical models. The solver has been used to develop several unique diffusion models. A novel model for impurity diffusion in polysilicon treats the problem as a two-stream process, with relatively slow standard diffusion within the grain and a much more rapid component of diffusion along the grain boundaries. The two components are coupled at each point by a segregation term. Two other models for impurity diffusion in silicon include explicit calculation of the coupling of point defects with impurities. One of the point-defect models is a general and detailed formulation from a chemical kinetics viewpoint, while the other makes further assumptions to simplify the model for engineering analysis.<>
Sponsorship	IEEE Council on Electronic Design Automation IEEE Circuits and Systems Society
Starting Page	336
Ending Page	349
Page Count	14
File Size	1465680
File Format	PDF
ISSN	02780070
Volume Number	8
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1989-04-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Very large scale integration Impurities Computational modeling Ion implantation Chemical analysis Computer simulation Oxidation Epitaxial growth Etching Monte Carlo methods
Content Type	Text
Resource Type	Article
Subject	Computer Graphics and Computer-Aided Design Electrical and Electronic Engineering Software

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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