NDLI: Calibration procedure developed for IR surface-temperature measurements

Content Provider	IEEE Xplore Digital Library
Author	Bennett, G.A. Briles, S.D.
Copyright Year	1978
Abstract	Obtaining infrared (IR) surface-temperature measurements of miniature square targets on the order of 1.6 mm with a spatial resolution of 15 mu m has recently become possible using the Barnes Engineering Computherm system, but the accuracy and precision of the measurements have been limited. The objective of the present work is to provide a calibration procedure that will improve the accuracy and precision of the two-dimensional temperature measurement. A method of measuring surface temperatures on semiconductor surfaces using subminiature syringe thermocouples to remove the emissivity calculation error is described. Accuracy is further improved by numerically removing the estimated system distortion from the radiance scan image. The precision of the IR microscope is improved by averaging scans to minimize the random noise. Investigations into defining and correcting the distortions and noise have improved the accuracy on precisely controlled black-body sources to +or-0.025 degrees C and the precision to +or-0.03 degrees C.<>
Sponsorship	IEEE Electronic Industries Alliance American Society of Mechanical Engineering (ASME) NBS SAE
Starting Page	690
Ending Page	695
Page Count	6
File Size	716748
File Format	PDF
ISSN	01486411
Volume Number	12
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1989-12-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Calibration Temperature measurement Distortion measurement Radiofrequency amplifiers Power amplifiers Spatial resolution Optical computing Microscopy Infrared detectors Semiconductor device noise
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Engineering Electrical and Electronic Engineering

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