NDLI: Preparation of Garnet Films for Hybrid Head by RF-Sputtering

Content Provider	IEEE Xplore Digital Library
Author	Yamashita, S. Ikeda, M. Hara, K.
Copyright Year	1985
Abstract	Garnet films have the low saturation flux density characteristics required for use in the ring head gap sections of hybrid heads. Conditions for preparation of garnet films by the RF sputter technique were studied. Oxygen density, annealing time, and power supplied were the most important film formation factors, while target material composition was also significant, with a critical level of 5 percent. It was found that annealing from 950°C for 30 min after film growth under 50 W applied power in an argon atmosphere including 2 percent oxygen produced the best garnet film with characteristics close to those of bulk material.
Starting Page	671
Ending Page	672
Page Count	2
File Size	224004
File Format	PDF
ISSN	08824959
Volume Number	2
Issue Number	7
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1987-07-01
Publisher Place	Hiroshima, Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Garnet films Annealing Magnetic materials Magnetic heads Oxygen Power supplies Radio frequency Argon Substrates Magnetic analysis
Content Type	Text
Resource Type	Article

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