NDLI: A thin-membrane surface-acoustic-wave vapor-sensing device

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A thin-membrane surface-acoustic-wave vapor-sensing device

Content Provider	IEEE Xplore Digital Library
Author	Chuang, C.T. White, R.M. Bernstein, J.J.
Copyright Year	1980
Abstract	An integrated silicon-based vapor sensor is realized with a ZnO-on-Si surface-acoustic-wave (SAW) oscillator containing an absorptive polymer located on a thinned, membrane region of the device. If the membrane thickness is comparable with or smaller than a SAW wavelength, wave energy is present at both membrane surfaces. Thus the SAW transducers and associated amplifiers can be protected by an enclosure, leaving only the polymer exposed to the ambient atmosphere. Experiments on a 30 MHz, ZnO-on-silicon thin-membrane temperature-compensated SAW oscillator for vapor sensing are described. The use of the multi-channel device for solubility parameter sensing is discussed.
Sponsorship	IEEE Electron Devices Society
Starting Page	145
Ending Page	148
Page Count	4
File Size	495380
File Format	PDF
ISSN	07413106
Volume Number	3
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1982-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface acoustic waves Biomembranes Oscillators Transducers Atmosphere Polymer films Surface waves Frequency Lithium niobate Substrates
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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