NDLI: Inductively Coupling Plasma Reactor With Plasma Electron Energy Controllable in the Range From <formula formulatype=inline><tex Notation=TeX>${sim}{6}$</tex></formula> to <formula formulatype=inline><tex Notation=TeX>${sim}{rm 100}~{rm eV}$</tex></formula>

Content Provider	IEEE Xplore Digital Library
Author	Shunko, E.V. Stevenson, D.E. Belkin, V.S.
Copyright Year	1973
Abstract	This paper discusses a theoretical and experimental investigation of parameters of plasma [hydrogen (H2) and argon (Ar)] developed in an inductively coupling plasma reactor. The reactor was shaped as a planar chamber inserted between two gaps formed between two separated identical halves of a quasi-closed solenoid cut along its diameter and powered with a 13.56-MHz RF to generate a closed loop of alternating magnetic field crossing the reactor chamber twice. It has been shown that the solution of the Hamilton-Jacobi equation describing motion of a charged particle with the certain momentum in a radial cylindrical wave generated in a gap of the quasi-closed solenoid can be presented as the particle motion along a closed Fig. 8-type trajectory. Simple estimation based on this solution has shown that energy of plasma electrons captured and accelerated in the gap at reasonable power applied to the solenoid should run up to ~ 70 eV. Experiments have shown that in the reactor filled with H2 at 6 mtorr and powered, for example, with 2 kW of 13.56-MHz RF, the electrons accelerated in electromagnetic fields were arranged in three distinct populations: 1) electrons of ~ 130-eV energy detected as stable electron flows; 2) certain portion of electrons mentioned in 1) diffused on neutrals and forming in velocity space a layer with thickness ~ 6 eV at average energy ~ 100 eV; and 3) a small population of cold electrons of ~ 20-eV energy in plasma potential vicinity. It has been shown also that the certain disposition of one of the quasi-closed solenoid halves with respect to the other one leads to the electron energy variation at approximate conservation of their density for all of the electron populations in the range from ~ 6 to ~ 100 eV. The same effect can be obtained by shift of phase of the RF source powering one of the solenoid halves with respect to the other one.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	774
Ending Page	785
Page Count	12
File Size	2187177
File Format	PDF
ISSN	00933813
Volume Number	42
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasmas Inductors Solenoids Probes Sociology Statistics Radio frequency Plasma simulation
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Plasma uniformity of inductively coupled plasma reactor with helical heating coil

Tailoring Ion Energy Distributions Using Pulsed Plasmas

Modeling of high-pressure, high-frequency (RF) oxygen plasmas

Dynamics of mode transitions in inductively-coupled plasmas

Microarcing in a Helicon Plasma Reactor

Nonmonotonic spatial decay and shield height effects in inductively coupled plasmas

Modeling an inductively coupled plasma reactor with chlorine chemistry

Observation of Stationary Plasma Striation and Collimated Plasma Transport in a 100-kHz Inductively Coupled Plasma Discharge

Planar inductively coupled plasmas operated with low and high radio frequencies

Inductively Coupling Plasma Reactor With Plasma Electron Energy Controllable in the Range From ${sim}{6}$ to ${sim}{rm 100}~{rm eV}$

Similar Documents

Plasma uniformity of inductively coupled plasma reactor with helical heating coil

Tailoring Ion Energy Distributions Using Pulsed Plasmas

Modeling of high-pressure, high-frequency (RF) oxygen plasmas

Dynamics of mode transitions in inductively-coupled plasmas

Microarcing in a Helicon Plasma Reactor

Nonmonotonic spatial decay and shield height effects in inductively coupled plasmas

Modeling an inductively coupled plasma reactor with chlorine chemistry

Observation of Stationary Plasma Striation and Collimated Plasma Transport in a 100-kHz Inductively Coupled Plasma Discharge

Planar inductively coupled plasmas operated with low and high radio frequencies

Inductively Coupling Plasma Reactor With Plasma Electron Energy Controllable in the Range From ${sim}{6}$ to ${sim}{rm 100}~{rm eV}$