NDLI: Use of fluorine-doped silicon oxide for temperature compensation of radio frequency surface acoustic wave devices

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Use of fluorine-doped silicon oxide for temperature compensation of radio frequency surface acoustic wave devices

Content Provider	IEEE Xplore Digital Library
Author	Matsuda, S. Hara, M. Miura, M. Matsuda, T. Ueda, U.M. Satoh, Y. Hashimoto, K.
Copyright Year	1986
Abstract	This paper investigates acoustic properties, including the temperature coefficient of elasticity (TCE), of fluorine-doped silicon oxide (SiOF) films and proposes the application of the films to the temperature compensation of RF SAW devices. From Fourier transform infrared spectroscopy (FT-IR), SiOF films were expected to possess good TCE properties. We fabricated a series of SAW devices using the SiOF-overlay/Cu-grating/LiNbO₃-substrate structure, and evaluated their performance. The experiments showed that the temperature coefficient of frequency (TCF) increases with the fluorine content r, as we expected from the FT-IR measurement. This means that the Si-O-Si atomic structure measurable by the FT-IR governs the TCE behavior of SiO₂-based films even when the dopant is added. In comparison with pure SiO₂ with the film thickness h of 0.3 wavelengths (λ), TCF was improved by 7.7 ppm/°C without deterioration of the effective electromechanical coupling factor K2 when r = 3.8 atomic % and h = 0.28λ. Fluorine inclusion did not obviously influence the resonators' Q factors when r <; 8.8 atomic %.
File Size	397435
File Format	PDF
ISSN	08853010
Volume Number	59
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Films Temperature measurement Surface acoustic wave devices Temperature Educational institutions Atomic measurements
Content Type	Text
Resource Type	Article
Subject	Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering

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