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Development of miniature electromechanical pressure sensor arrays (mempsa) for high resolution thermospheric and mesospheric neutral wind measurements
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | White, Robert C. |
| Organization | The National Aeronautics and Space Administration (NASA) |
| Copyright Year | 1996 |
| Abstract | This report documents progress made in the first six months on NASA contract NASW-5034. The goal of this project is to: (1) fabricate microelectromechanical systems (MEMS) based components as highly sensitive pressure transducers and (2) incorporate those transducers into a prototype instrument for the measurement of thermospheric and mesospheric neutral winds. The MEMS based components are tunnel displacement transducers (TDT's). TDT's are a new technology available because of simultaneous advances in microelectronics fabrication techniques, silicon micromechanics, and the use of quantum mechanical tunneling in robust, manufacturable devices. |
| File Size | 586328 |
| File Format | |
| Alternate Webpage(s) | http://www.archive.org/details/nasa_techdoc_19960044630 |
| Archival Resource Key | ark:/13960/t4zg7hg30 |
| Language | English |
| Publisher Date | 1996-04-01 |
| Publisher Institution | NASA (non Center Specific) |
| Access Restriction | Open |
| Subject Keyword | Heliosphere Perturbation Theory Boundaries Galactic Cosmic Rays Size Determination Voyager 2 Spacecraft Pioneer 10 Space Probe Imp Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |