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Multi-channel electronically scanned cryogenic pressure sensor
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Organization | The National Aeronautics and Space Administration (NASA) |
| Copyright Year | 1995 |
| Description | A miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multielement array. These dies are bonded at specific sites on a glass, prepatterned substrate. Thermal data is multiplexed and recorded on each individual pressure measuring diaphragm. The device functions in a cryogenic environment without the need of heaters to keep the sensor at constant temperatures. |
| File Size | 858503 |
| File Format | |
| Alternate Webpage(s) | http://www.archive.org/details/nasa_techdoc_19950020718 |
| Archival Resource Key | ark:/13960/t3514w431 |
| Language | English |
| Publisher Date | 1995-04-04 |
| Publisher Institution | Langley Research Center |
| Access Restriction | Open |
| Subject Keyword | Infrared Spectroscopy Albedo Callisto Carbon Dioxide Ganymede Methane Spectral Bands Spectrum Analysis Jupiter Atmosphere Molecular Spectra Molecules Planetary Composition Satellite Atmospheres Saturn Atmosphere Titan Aerosols Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
