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Development of ion implantation techniques for microelectronics
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Marsh, O. J. Dunlap, H. L. Hunsperger, R. G. |
| Organization | The National Aeronautics and Space Administration (NASA) |
| Copyright Year | 1969 |
| Description | Ion implantation techniques for p-n junction diodes of silicon carbide and gallium arsenide |
| File Size | 3619992 |
| File Format | |
| Alternate Webpage(s) | http://www.archive.org/details/nasa_techdoc_19700008009 |
| Archival Resource Key | ark:/13960/t6058852q |
| Language | English |
| Publisher Date | 1969-10-01 |
| Access Restriction | Open |
| Subject Keyword | Electronic Equipment Error Analysis Inertial Navigation Strapdown Inertial Guidance Alignment Computer Programming Geodetic Coordinates Perturbation Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |