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Integration of nanostructures into microsensor devices on whole wafers
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Berger, Gordon M. Hunter, Gary W. Evans, Laura J. Biaggi-Labiosa, Azlin M. |
| Copyright Year | 2015 |
| Description | Chemical sensors are used in a wide variety of applications, such as environmental monitoring, fire detection, emission monitoring, and health monitoring. The fabrication of chemical sensors involving nanostructured materials holds the potential for the development of sensor systems with unique properties and improved performance. However, the fabrication and processing of nanostructures for sensor applications currently are limited in the ability to control their location on the sensor, which in turn hinders the progress for batch fabrication. This report discusses the advantages of using nanomaterials in sensor designs, some of the challenges encountered with the integration of nanostructures into microsensor / devices, and then briefly describes different methods attempted by other groups to address this issue. Finally, this report will describe how our approach for the controlled alignment of nanostructures onto a sensor platform was applied to demonstrate an approach for the mass production of sensors with nanostructures.|||||||||||| |
| File Size | 3513082 |
| Page Count | 20 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20160001343 |
| Archival Resource Key | ark:/13960/t2n63jh6p |
| Language | English |
| Publisher Date | 2015-06-01 |
| Access Restriction | Open |
| Subject Keyword | Nanostructures (devices) Sensors Nanotechnology Fabrication Wafers Microinstrumentation Electrophoresis Chemical Detection Nanowires Nanostructures Devices Microstructure Electric Fields Aluminum Oxides Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
