NDLI: Silicon alignment pins: an easy way to realize a wafer-to-wafer alignment

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Silicon alignment pins: an easy way to realize a wafer-to-wafer alignment

Content Provider	NASA Technical Reports Server (NTRS)
Author	Lee, Choonsup Lin, Robert H. Thomas, Bertrand Reck, Theodore J. Gill, John J. Chattopadhyay, Goutam Mehdi, Imran Jung-Kubiak, Cecile Peralta, Alejandro Toda, Risaku Siles, Jose Cooper, Ken B.
Copyright Year	2013
Description	Submillimeter heterodyne instruments play a critical role in addressing fundamental questions regarding the evolution of galaxies as well as being a crucial tool in planetary science. To make these instruments compatible with small platforms, especially for the study of the outer planets, or to enable the development of multi-pixel arrays, it is essential to reduce the mass, power, and volume of the existing single-pixel heterodyne receivers. Silicon micromachining technology is naturally suited for making these submillimeter and terahertz components, where precision and accuracy are essential. Waveguide and channel cavities are etched in a silicon bulk material using deep reactive ion etching (DRIE) techniques. Power amplifiers, multiplier and mixer chips are then integrated and the silicon pieces are stacked together to form a supercompact receiver front end. By using silicon micromachined packages for these components, instrument mass can be reduced and higher levels of integration can be achieved. A method is needed to assemble accurately these silicon pieces together, and a technique was developed here using etched pockets and silicon pins to align two wafers together.
File Size	178120
Page Count	2
File Format	PDF
Alternate Webpage(s)	http://archive.org/details/NASA_NTRS_Archive_20130014523
Archival Resource Key	ark:/13960/t0zp91g5w
Language	English
Publisher Date	2013-12-01
Access Restriction	Open
Subject Keyword	Astronomy Electronics And Electrical Engineering Alignment Wafers Heterodyning Micromachining Receivers Assembling Submillimeter Waves Silicon Pins Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science
Content Type	Text
Resource Type	Technical Report

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