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Integral resonator gyroscope
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2008 |
| Description | The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case. |
| File Size | 2904078 |
| Page Count | 47 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080020441 |
| Archival Resource Key | ark:/13960/t5x68gd38 |
| Language | English |
| Publisher Date | 2008-03-25 |
| Access Restriction | Open |
| Subject Keyword | Patents Wafers Inventions Etching Gyroscopes Detection Resonators Bonding Walls Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
