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Microgyroscope with integrated vibratory element
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2002 |
| Description | A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which is the rotation rate sensing element. The vertical post is formed from the same silicon wafers as the rest of the microgyroscope. A first portion of the vertical post and the clover-leaf structure are made from a first silicon wafer. A second portion of the vertical post and the baseplate are made from a second silicon wafer. The two portions are then bonded together to from the clover-leaf gyroscope with an integrated post structure. |
| File Size | 283072 |
| Page Count | 4 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080004944 |
| Archival Resource Key | ark:/13960/t0102467k |
| Language | English |
| Publisher Date | 2002-12-03 |
| Access Restriction | Open |
| Subject Keyword | Microinstrumentation Patents Gyroscopes Vibration Rotation Coriolis Effect Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
