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Diffractive optical elements on non-flat substrates using electron beam lithography
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2002 |
| Description | The present disclosure describes a technique for creating diffraction gratings on curved surfaces with electron beam lithography. The curved surface can act as an optical element to produce flat and aberration-free images in imaging spectrometers. In addition, the fabrication technique can modify the power structure of the grating orders so that there is more energy in the first order than for a typical grating. The inventors noticed that by using electron-beam lithography techniques, a variety of convex gratings that are well-suited to the requirements of imaging spectrometers can be manufactured. |
| File Size | 860255 |
| Page Count | 15 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080004513 |
| Archival Resource Key | ark:/13960/t0bw2f456 |
| Language | English |
| Publisher Date | 2002-11-12 |
| Access Restriction | Open |
| Subject Keyword | Optics Patents Electron Beams Diffractive Optics Lithography Surfaces Gratings Spectra Substrates Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
