NDLI: Mems based acoustic array

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Mems based acoustic array

Content Provider	NASA Technical Reports Server (NTRS)
Copyright Year	2006
Description	Embodiments of the present invention described and shown in the specification aid drawings include a combination responsive to an acoustic wave that can be utilized as a dynamic pressure sensor. In one embodiment of the present invention, the combination has a substrate having a first surface and an opposite second surface, a microphone positioned on the first surface of the substrate and having an input and a first output and a second output, wherein the input receives a biased voltage, and the microphone generates an output signal responsive to the acoustic wave between the first output and the second output. The combination further has an amplifier positioned on the first surface of the substrate and having a first input and a second input and an output, wherein the first input of the amplifier is electrically coupled to the first output of the microphone and the second input of the amplifier is electrically coupled to the second output of the microphone for receiving the output sinual from the microphone. The amplifier is spaced from the microphone with a separation smaller than 0.5 mm.
File Size	6964729
Page Count	26
File Format	PDF
Alternate Webpage(s)	http://archive.org/details/NASA_NTRS_Archive_20070003584
Archival Resource Key	ark:/13960/t2t48nz70
Language	English
Publisher Date	2006-08-15
Access Restriction	Open
Subject Keyword	Acoustics Microelectromechanical Systems Pressure Sensors Electric Potential Patents Sound Waves Bias Arrays Microphones Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science
Content Type	Text
Resource Type	Patent

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