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Carbon nanotube interconnect
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2006 |
| Description | Method and system for fabricating an electrical interconnect capable of supporting very high current densities ( 10(exp 6)-10(exp 10) Amps/sq cm), using an array of one or more carbon nanotubes (CNTs). The CNT array is grown in a selected spaced apart pattern, preferably with multi-wall CNTs, and a selected insulating material, such as SiOw, or SiuNv is deposited using CVD to encapsulate each CNT in the array. An exposed surface of the insulating material is planarized to provide one or more exposed electrical contacts for one or more CNTs. |
| File Size | 12634832 |
| Page Count | 12 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20060050043 |
| Archival Resource Key | ark:/13960/t24b8237m |
| Language | English |
| Publisher Date | 2006-08-22 |
| Access Restriction | Open |
| Subject Keyword | Electronics And Electrical Engineering Fabrication Patents Insulation High Current Carbon Nanotubes Encapsulating Current Density Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
