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Fundamental insight on developing low dielectric constant polyimides
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Simpson, J. O. SaintClair, A. K. |
| Copyright Year | 1997 |
| Description | Thermally stable, durable, insulative polyimides are in great demand for the fabrication of microelectronic devices. In this investigation dielectric and optical properties have been studied for several series of aromatic polyimides. The effect of polarizability, fluorine content, and free volume on dielectric constant was examined. In general, minimizing polarizability, maximizing free volume and fluorination all lowered dielectric constants in the polyimides studied. |
| File Size | 118443 |
| Page Count | 19 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20040110401 |
| Archival Resource Key | ark:/13960/t8tb62418 |
| Language | English |
| Publisher Date | 1997-01-01 |
| Access Restriction | Open |
| Subject Keyword | Nonmetallic Materials Fabrication Optical Properties Dielectric Properties Polyimides Microelectronics Fluorination Permittivity Thermal Stability Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
