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Pecvd growth of carbon nanotubes
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | McAninch, Ian |
| Copyright Year | 2001 |
| Description | Plasma enhanced chemical vapor deposition (PECVD), using inductively coupled plasma, has been used to grow carbon nanotubes (CNTs) and graphitic carbon fibers (GCF) on substrates sputtered with aluminum and iron catalyst. The capacitive plasma's power has been shown to cause a transition from nanotubes to nanofibers, depending on the strength of the plasma. The temperature, placement, and other factors have been shown to affect the height and density of the tube and fiber growth. |
| File Size | 2033702 |
| Page Count | 12 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20020042339 |
| Archival Resource Key | ark:/13960/t3c014n0k |
| Language | English |
| Publisher Date | 2001-07-31 |
| Access Restriction | Open |
| Subject Keyword | Solid-state Physics Carbon Fibers Vapor Deposition Catalysts Aluminum Plasmas Physics Carbon Nanotubes Capacitance Iron Sputtering Substrates Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
