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Method of forming micro-sensor thin-film anemometer
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2000 |
| Description | A device for measuring turbulence in high-speed flows is provided which includes a micro- sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14 deg half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique. |
| File Size | 406485 |
| File Format | |
| Language | English |
| Publisher Date | 2000-02-01 |
| Access Restriction | Open |
| Subject Keyword | Thin Films Single Crystals Patents Turbulence High Speed Procedures Wedges Anemometers Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |