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Model for the vaporization of mixed organometallic compounds in the metalorganic chemical vapor deposition of high temperature superconducting films
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Schneider, Roger L. Levy Sr., Moises Sarma, Bimal K. Meng, Guangyao Zhou, Gang |
| Copyright Year | 1993 |
| Description | A model of the vaporization and mass transport of mixed organometallics from a single source for thin film metalorganic chemical vapor deposition is presented. A stoichiometric gas phase can be obtained from a mixture of the organometallics in the desired mole ratios, in spite of differences in the volatilities of the individual compounds. Proper film composition and growth rates are obtained by controlling the velocity of a carriage containing the organometallics through the heating zone of a vaporizer. |
| File Size | 275719 |
| Page Count | 3 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19970017809 |
| Archival Resource Key | ark:/13960/t52g2nc9h |
| Language | English |
| Publisher Date | 1993-10-04 |
| Access Restriction | Open |
| Subject Keyword | Nonmetallic Materials Thin Films Stoichiometry Superconducting Films Vaporizing Heating Vapor Phases Organometallic Compounds Metalorganic Chemical Vapor Deposition High Temperature Mass Transfer Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
