NDLI: Pzt thin film piezoelectric traveling wave motor

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Pzt thin film piezoelectric traveling wave motor

Content Provider	NASA Technical Reports Server (NTRS)
Author	Yang, Genqing Shen, Dexin Zhang, Baoan Wang, Weiyuan Jiao, Jiwei Lu, Jianguo
Copyright Year	1995
Description	With the development of micro-electro-mechanical systems (MEMS), its various applications are attracting more and more attention. Among MEMS, micro motors, electrostatic and electromagnetic, are the typical and important ones. As an alternative approach, the piezoelectric traveling wave micro motor, based on thin film material and integrated circuit technologies, circumvents many of the drawbacks of the above mentioned two types of motors and displays distinct advantages. In this paper we report on a lead-zirconate-titanate (PZT) piezoelectric thin film traveling wave motor. The PZT film with a thickness of 150 micrometers and a diameter of 8 mm was first deposited onto a metal substrate as the stator material. Then, eight sections were patterned to form the stator electrodes. The rotor had an 8 kHz frequency power supply. The rotation speed of the motor is 100 rpm. The relationship of the friction between the stator and the rotor and the structure of the rotor on rotation were also studied.
File Size	222614
Page Count	6
File Format	PDF
Alternate Webpage(s)	http://archive.org/details/NASA_NTRS_Archive_19960054120
Archival Resource Key	ark:/13960/t9188788q
Language	English
Publisher Date	1995-01-01
Access Restriction	Open
Subject Keyword	Electronics And Electrical Engineering Thin Films Fabrication Integrated Circuits Microminiaturized Electronic Devices Friction Display Devices Rotors Stators Piezoelectricity Microminiaturization Electric Motors Lead Zirconate Titanates Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science
Content Type	Text
Resource Type	Article

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