NDLI: Diamond thin film temperature and heat-flux sensors

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Diamond thin film temperature and heat-flux sensors

Content Provider	NASA Technical Reports Server (NTRS)
Author	Aslam, M. Masood, A. Yang, G. S. Fredricks, R.
Copyright Year	1995
Description	Diamond film temperature and heat-flux sensors are developed using a technology compatible with silicon integrated circuit processing. The technology involves diamond nucleation, patterning, doping, and metallization. Multi-sensor test chips were designed and fabricated to study the thermistor behavior. The minimum feature size (device width) for 1st and 2nd generation chips are 160 and 5 micron, respectively. The p-type diamond thermistors on the 1st generation test chip show temperature and response time ranges of 80-1270 K and 0.29-25 microseconds, respectively. An array of diamond thermistors, acting as heat flux sensors, was successfully fabricated on an oxidized Si rod with a diameter of 1 cm. Some problems were encountered in the patterning of the Pt/Ti ohmic contacts on the rod, due mainly to the surface roughness of the diamond film. The use of thermistors with a minimum width of 5 micron (to improve the spatial resolution of measurement) resulted in lithographic problems related to surface roughness of diamond films. We improved the mean surface roughness from 124 nm to 30 nm by using an ultra high nucleation density of 10(exp 11)/sq cm. To deposit thermistors with such small dimensions on a curved surface, a new 3-D diamond patterning technique is currently under development. This involves writing a diamond seed pattern directly on the curved surface by a computer-controlled nozzle.
File Size	1041324
Page Count	20
File Format	PDF
Alternate Webpage(s)	http://archive.org/details/NASA_NTRS_Archive_19950024426
Archival Resource Key	ark:/13960/t9770dm78
Language	English
Publisher Date	1995-07-03
Access Restriction	Open
Subject Keyword	Solid-state Physics Additives Nucleation Control Equipment Metallizing Temperature Measuring Instruments Surface Roughness Multisensor Applications Heat Flux Thin Films Integrated Circuits Thermistors Automatic Control Silicon Chips Electronics Spatial Resolution Deposition Diamond Films Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science
Content Type	Text
Resource Type	Technical Report

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