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Plasma-deposited amorphous hydrogenated carbon films and their tribological properties
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Miyoshi, Kazuhisa Pouch, John J. Alterovitz, Samuel A. |
| Copyright Year | 1989 |
| Description | Recent work on the properties of diamondlike carbon films and their dependence on preparation conditions are reviewed. The results of the study indicate that plasma deposition enables one to deposit a variety of amorphous hydrogenated carbon (a-C:H ) films exhibiting more diamondlike behavior to more graphitic behavior. The plasma-deposited a-C:H can be effectively used as hard, wear-resistant, and protective lubricating films on ceramic materials such as Si(sub 3)N(sub 4) under a variety of environmental conditions such as moist air, dry nitrogrn, and vacuum. |
| File Size | 640181 |
| Page Count | 14 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19900002564 |
| Archival Resource Key | ark:/13960/t9m37qn0r |
| Language | English |
| Publisher Date | 1989-10-01 |
| Access Restriction | Open |
| Subject Keyword | Nonmetallic Materials Thin Films Vacuum Lubricants Plasmas Physics Moisture Air Ceramics Nitrogen Carbon Deposition Tribology Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
