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Pulsed excimer laser processing
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Wong, D. |
| Copyright Year | 1985 |
| Description | The status of pulsed excimer laser processing of PV cells is presented. The cost effective feasibility of fabricating high efficiency solar cells on Czochralski wafers using a pulsed excimer laser for junction formation, surface passivation, and front metallization. Laser annealing results were promising with the best AR coated cell having an efficiency of 16.1%. Better results would be expected with larger laser spot size because there was some degradation in open circuit voltage caused by laser spot overlap and edge effects. Surface heating and photolytic decomposition by the laser was used to deposit tungsten from the reaction of tungsten hexafluoride and hydrogen. The line widths were 5 to 10 mils, and the depositions passed the tape adhesion test. Thinner lines are practical using an optimized optical system. |
| File Size | 297157 |
| Page Count | 15 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19860019908 |
| Archival Resource Key | ark:/13960/t1ck38s9f |
| Language | English |
| Publisher Date | 1985-06-01 |
| Access Restriction | Open |
| Subject Keyword | Energy Production And Conversion Solar Cells Ion Implantation Semiconductor Junctions Metallizing Pulsed Lasers Adhesion Passivity Vapor Deposition Cost Effectiveness Wafers Tungsten Excimer Lasers Laser Annealing Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
