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Development of a polysilicon process based on chemical vapor deposition, phase 1 and phase 2
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Plahutnik, F. Sawyer, D. Sharp, K. Arvidson, A. |
| Copyright Year | 1982 |
| Description | High-purity polycrystalline silicon was produced in an experimental, intermediate and advanced CVD reactor. Data from the intermediate and advanced reactors confirmed earlier results obtained in the experimental reactor. Solar cells were fabricated by Westinghouse Electric and Applied Solar Research Corporation which met or exceeded baseline cell efficiencies. Feedstocks containing trichlorosilane or silicon tetrachloride are not viable as etch promoters to reduce silicon deposition on bell jars. Neither are they capable of meeting program goals for the 1000 MT/yr plant. Post-run CH1 etch was found to be a reasonably effective method of reducing silicon deposition on bell jars. Using dichlorosilane as feedstock met the low-cost solar array deposition goal (2.0 gh-1-cm-1), however, conversion efficiency was approximately 10% lower than the targeted value of 40 mole percent (32 to 36% achieved), and power consumption was approximately 20 kWh/kg over target at the reactor. |
| File Size | 4646429 |
| Page Count | 149 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19840025944 |
| Archival Resource Key | ark:/13960/t6xw97w17 |
| Language | English |
| Publisher Date | 1982-08-01 |
| Access Restriction | Open |
| Subject Keyword | Energy Production And Conversion Solar Cells Economic Analysis Solar Arrays Flat Plates Catalysts Purity Decomposition Hydrogenation Chlorosilanes Vapor Deposition Semiconductors Materials Production Engineering Reaction Kinetics Silicon Chemical Reactors Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
