Loading...
Please wait, while we are loading the content...
Similar Documents
Low cost solar array project 1: silicon material
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Hill, D. M. Jewett, D. N. Bates, H. E. |
| Copyright Year | 1980 |
| Description | The low cost production of silicon by deposition of silicon from a hydrogen/chlorosilane mixture is described. Reactor design, reaction vessel support systems (physical support, power control and heaters, and temperature monitoring systems) and operation of the system are reviewed. Testing of four silicon deposition reactors is described, and test data and consequently derived data are given. An 18% conversion of trichlorosilane to silicon was achieved, but average conversion rates were lower than predicted due to incomplete removal of byproduct gases for recycling and silicon oxide/silicon polymer plugging of the gas outlet. Increasing the number of baffles inside the reaction vessel improved the conversion rate. Plans for further design and process improvements to correct the problems encountered are outlined. |
| File Size | 700522 |
| Page Count | 25 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19810013014 |
| Archival Resource Key | ark:/13960/t1tf4mc6s |
| Language | English |
| Publisher Date | 1980-01-01 |
| Access Restriction | Open |
| Subject Keyword | Energy Production And Conversion Solar Cells Chlorosilanes Silicon Reactor Design Operational Problems Chemical Reactors Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |