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Apparatus for measuring semiconductor device resistance
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1980 |
| Description | A test structure is described for enabling the accurate measurement of the resistance characteristics of a semiconductor material and includes one or more pairs of electrical terminals disposed on the surface of the material to enable measurements of the resistance encountered by currents passed between the terminals. A pair of terminals includes a first terminal extending in a closed path, such as a circle, around a second terminal, so that all currents flowing between the terminals flow along a region of known width and length. Two or more pairs of concentric terminals can be utilized, wherein the ratio of radii of each pair of terminals is the same as the ratio for all other pairs of terminals, to facilitate the calculation of the contact resistance between each terminal and the semiconductor surface, as well as the calculation of the resistance of the semiconductor material apart from the effect of the terminal to semiconductor contact resistances. |
| File Size | 590982 |
| Page Count | 8 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19800024142 |
| Archival Resource Key | ark:/13960/t3c010j9x |
| Language | English |
| Publisher Date | 1980-08-19 |
| Access Restriction | Open |
| Subject Keyword | Electronics And Electrical Engineering Electrical Resistance Electrical Measurement Impedance Measurement Semiconductor Devices Measuring Instruments Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
