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Miniature piezoresistive solid state integrated pressure sensors
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Kahng, S. K. |
| Copyright Year | 1980 |
| Description | The characteristics of silicon pressure sensors with an ultra-small diaphragm are described. The pressure sensors utilize rectangular diaphragm as small as 0.0127 x 0.0254 cm and a p-type Wheatstone bridge consisting of diffused piezoresistive elements, 0.000254 cm by 0.00254 cm. These sensors exhibit as high as 0.5 MHz natural frequency and 1 mV/V/psi pressure sensitivity. Fabrication techniques and high frequency results from shock tube testing and low frequency comparison with microphones are presented. |
| File Size | 1167305 |
| Page Count | 35 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19800009164 |
| Archival Resource Key | ark:/13960/t04z03k30 |
| Language | English |
| Publisher Date | 1980-02-01 |
| Access Restriction | Open |
| Subject Keyword | Pressure Sensors Fabrication Piezoresistive Transducers Silicon Solid State Devices High Frequencies Low Frequencies Miniature Electronic Equipment Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
