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Low cost silicon solar array project: feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Breneman, W. C. |
| Copyright Year | 1978 |
| Description | Silicon epitaxy analysis of silane produced in the Process Development Unit operating in a completely integrated mode consuming only hydrogen and metallurgical silicon resulted in film resistivities of up to 120 ohms cm N type. Preliminary kinetic studies of dichlorosilane disproportionation in the liquid phase have shown that 11.59% SiH4 is formed at equilibrium after 12 minutes contact time at 56 C. The fluid-bed reactor was operated continuously for 48 hours with a mixture of one percent silane in helium as the fluidizing gas. A high silane pyrolysis efficiency was obtained without the generation of excessive fines. Gas flow conditions near the base of the reactor were unfavorable for maintaining a bubbling bed with good heat transfer characteristics. Consequently, a porous agglomerate formed in the lower portion of the reactor. Dense coherent plating was obtained on the silicon seed particles which had remained fluidizied throughout the experiment. |
| File Size | 10764628 |
| Page Count | 85 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19790008205 |
| Archival Resource Key | ark:/13960/t25b4x35s |
| Language | English |
| Publisher Date | 1978-09-01 |
| Access Restriction | Open |
| Subject Keyword | Energy Production And Conversion Silanes Pyrolysis Solar Arrays Semiconductors Materials Gas Flow Low Cost Silicon Heat Transfer Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
