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Tantalum cathode improves electron-beam evaporation of tantalum
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1965 |
| Description | Tantalum cathode is used in assembly for electron beam evaporation of tantalum onto a substrate. The cathode and anode are made of pure tantalum rather than tungsten to prevent contamination of the tantalum film deposited on the substrate. |
| File Size | 87091 |
| Page Count | 1 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19650000173 |
| Archival Resource Key | ark:/13960/t0004w15x |
| Language | English |
| Publisher Date | 1965-06-01 |
| Access Restriction | Open |
| Subject Keyword | Materials Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |