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Comparative Study of Influence of Experimental Configuration on Densities of Active Species in the Early Afterglows of N2/(0–2.5%)H2 HF Flowing Plasmas
| Content Provider | Hyper Articles en Ligne (HAL) |
|---|---|
| Author | Abdeladim, M Sarrette, J.-P. Amorim, J Ricard, André |
| Abstract | Afterglows of mixed gas of N 2 and H 2 (0-2.5%) flowing microwave discharges in a 5 mm diameter tube connected to a 5 L reactor via a tube of 1.8 cm diameter and 50 cm long, have been studied using optical emission spectroscopy. The obtained results at the entrance of the afterglow tube of 1.8 cm diameter: Short time afterglow (SA), (10-3 s) and inside the 5 L reactor: Long time afterglow (LA), (10-2 s) were then compared. It was found that, in N 2 at 2 Torr, 0.5 slpm, the active specie density ratios had a constant value of 10-2 for N/N 2 , but decreased respectively from 10-3 to 10-4 for N 2 (X,v > 13)/N 2 and from 10-6 to 10-8 for N + 2 /N 2. By directly connecting the discharge tube inside the 5 L reactor, the density increases by 10 for N 2 (X,v > 13) and by 10 2 for N 2 + by changing the afterglow from LA(10 −2 s) to a SA(10-3 s). Moreover and by adding 1% of H 2 to N 2 , the N/N 2 and H/H 2 ratios had constant values of 1% and 0.2% respectively. The SA(10-3 s) appeared to be more efficient for surface treatments than the LA (10-2 s). Keywords N 2-H 2 microwave discharges • N-atoms • N 2 metastable molecules • N 2 + ions • NH radicals and H-atoms |
| Related Links | https://hal.science/hal-03758406/file/s11090-022-10272-0.pdf |
| ISSN | 02724324 |
| e-ISSN | 15728986 |
| DOI | 10.1007/s11090-022-10272-0 |
| Volume Number | 42 |
| Conference Proceedings | Plasma Chemistry and Plasma Processing |
| Language | English |
| Publisher | HAL CCSD Springer Verlag |
| Publisher Date | 2022-07-16 |
| Access Restriction | Open |
| Subject Keyword | N2 metastable molecules N2+ ions N2-H2 microwave discharges N-atoms NH radicals and H-atoms Engineering Sciences [physics] Plasmas |
| Content Type | Text |
| Resource Type | Conference Proceedings |
| Subject | Chemistry Surfaces, Coatings and Films Physics and Astronomy Condensed Matter Physics Chemical Engineering |
