NDLI: Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS x -NbS x Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication.

Please wait, while we are loading the content...

Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS _x -NbS _x Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication.

Content Provider	Europe PMC
Author	Basuvalingam, Saravana Balaji Bloodgood, Matthew A. Verheijen, Marcel A. Kessels, Wilhelmus M. M. Bol, Ageeth A.
Copyright Year	2021
Abstract	The scalable andconformal synthesis of two-dimensional (2D) transitionmetal dichalcogenide (TMDC) heterostructures is a persisting challengefor their implementation in next-generation devices. In this work,we report the synthesis of nanometer-thick 2D TMDC heterostructuresconsisting of TiSx-NbSx on both planar and 3D structures using atomic layer deposition(ALD) at low temperatures (200–300 °C). To this end, aprocess was developed for the growth of 2D NbSx by thermal ALD using (tert-butylimido)-tris-(diethylamino)-niobium(TBTDEN) and H2S gas. This process complemented the TiSx thermal ALD process for the growth of 2D TiSx-NbSx heterostructures.Precise thickness control of the individual TMDC material layers wasdemonstrated by fabricating multilayer (5-layer) TiSx-NbSx heterostructures withindependently varied layer thicknesses. The heterostructures weresuccessfully deposited on large-area planar substrates as well asover a 3D nanowire array for demonstrating the scalability and conformalityof the heterostructure growth process. The current study demonstratesthe advantages of ALD for the scalable synthesis of 2D heterostructuresconformally over a 3D substrate with precise thickness control ofthe individual material layers at low temperatures. This makes theapplication of 2D TMDC heterostructures for nanoelectronics promisingin both BEOL and FEOL containing high-aspect-ratio 3D structures.
Related Links	https://europepmc.org/backend/ptpmcrender.fcgi?accid=PMC7885689&blobtype=pdf
Journal	ACS Applied Nano Materials [ACS Appl Nano Mater]
Volume Number	4
DOI	10.1021/acsanm.0c02820
PubMed Central reference number	PMC7885689
Issue Number	1
PubMed reference number	33615158
e-ISSN	25740970
Language	English
Publisher	American Chemical Society
Publisher Date	2021-01-04
Access Restriction	Open
Rights License	This is an open access article published under a Creative Commons Non-Commercial No Derivative Works (CC-BY-NC-ND) Attribution License, which permits copying and redistribution of the article, and creation of adaptations, all for non-commercial purposes. © 2021 The Authors. Published by AmericanChemical Society
Subject Keyword	ALD transition metal dichalcogenides titaniumdisulfide niobium disulfide thin films heterostructure conformality
Content Type	Text
Resource Type	Article
Subject	Materials Science

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Heterostructures of two-dimensional transition metal dichalcogenides: formation, ab initio modelling and possible applications

Fabrication of Large-Scale and Thickness-Modulated Two-Dimensional Transition Metal Dichalcogenides [2D TMDs] Nanolayers

Novel functional devices of transition metal dichalcogenide monolayers

Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies.

Controlling the harmonic generation in transition metal dichalcogenides and their heterostructures

Strain-engineered optoelectronic properties of 2D transition metal dichalcogenide lateral heterostructures

Production Methods of Van der Waals Heterostructures Based on Transition Metal Dichalcogenides

Functionalized Metallic 2D Transition Metal Dichalcogenide-Based Solid-State Electrolyte for Flexible All-Solid-State Supercapacitors.

Title of Document: EXPLOITING PROCESS SYNERGY BETWEEN ANODIC ALUMINUM OXIDE NANOTEMPLATES AND ATOMIC LAYER DEPOSITION: FROM THIN FILMS TO 3D NANO-ELECTRONIC DEVICES

Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS _x -NbS _x Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication.

Similar Documents

Heterostructures of two-dimensional transition metal dichalcogenides: formation, ab initio modelling and possible applications

Fabrication of Large-Scale and Thickness-Modulated Two-Dimensional Transition Metal Dichalcogenides [2D TMDs] Nanolayers

Novel functional devices of transition metal dichalcogenide monolayers

Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies.

Controlling the harmonic generation in transition metal dichalcogenides and their heterostructures

Strain-engineered optoelectronic properties of 2D transition metal dichalcogenide lateral heterostructures

Production Methods of Van der Waals Heterostructures Based on Transition Metal Dichalcogenides

Functionalized Metallic 2D Transition Metal Dichalcogenide-Based Solid-State Electrolyte for Flexible All-Solid-State Supercapacitors.

Title of Document: EXPLOITING PROCESS SYNERGY BETWEEN ANODIC ALUMINUM OXIDE NANOTEMPLATES AND ATOMIC LAYER DEPOSITION: FROM THIN FILMS TO 3D NANO-ELECTRONIC DEVICES

Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS x -NbS x Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication.

Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS _x -NbS _x Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication.